Semiconductor Grade SiC Coated Susceptor: A 2026 Review
Understanding the Contamination Challenge in Semiconductor Epitaxy Advanced semiconductor high-temperature processes—including crystal growth, epitaxy, and etching—demand components that are simultaneously high-purity, thermal-shock-resistant, and corrosion-resistant. Traditional materials such as quartz or standard graphite tend to degrade quickly when exposed to aggressive chemical or plasma environments. This degradation leads to outgassing, particle [...]